Investigations on the surface quality of grinded inner contours using different manufacturing strategies on fused silica

In the field of optical manufacturing, fused silica has a high and constantly growing application potential. Its material advantages, such as low thermal expansion shock resistance, well its transparency from ultraviolet to infrared spectral range, result in large number fields. For example, manufacturing processes semiconductor technology require high-quality quartz materials throughout wafer handling process avoid non-permissible contamination withstand temperatures. Another example are monolithic components for fiber preform where internal contours with aspect ratios (e.g. component length diameter) surface qualities required draw types special properties. The demands on complexity accuracy these increasing, which is accompanied by need analyse optimize modern CNC techniques more more. following, investigations grinding ratio presented, influence an ultrasonic assistance different machining strategies considered.